Schematic illustration of the experimental setup.
Typical spectrum recorded from neon-nitrogen admixture at a filling pressure of 0.1 mbar, 70% Ne, and 200 W.
Boltzmann’s plots for mixture plasma. (a) 60% Ne, 0.1 mbar filling pressure, and 200 W. (b) 80% Ne, 0.4 mbar filling pressure, and 200 W.
Excitation temperature vis-à-vis neon percentage in the admixture. (a) 0.1 mbar filling pressure. (b) 0.3 mbar filling pressure. (c) 0.5 mbar filling pressure.
Relative population densities of selected energy levels as a functions of their effective principle quantum number at 60% Ne, 200 W, and pressure at (a) 0.2 mbar, (b) 0.3 mbar, and (c) 0.5 mbar.
(a) The curve recorded at 60% Ne, 0.3 mbar pressure, and 250 W. (b) The EEDFs for different neon percentage in the mixture at 0.5 mbar pressure and 200 W.
The rate coefficient associated with the electron impact excitation of ground state of Neon atoms [Eq. (5), —] and its fit [Eq. (7), ----). (a) level with and and (b) level with and .
Modified Boltzmann plots of mixture plasma at 200 W: (a) 10% Ne and 0.1 mbar pressure and (b) 90% Ne and 0.5 mbar pressure.
Comparison of electron temperature measured by Langmuir probe technique and modified Boltzmann plot method as a function of neon percentage at 200 W: (a) 0.2 mbar pressure and (b) 0.5 mbar pressure.
spectral lines and spectroscopic data used to calculate electron temperature measurements.10
Selected neon energy levels and sum for each of excited levels and number of radiative transitions starting in each of the selected neon energy levels.
Variation in exponent and electron number density with pressure at 200 W rf power.
Comparison between and measured by OES technique as a function of neon percentage and pressure at 200 W RF power.
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