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Characterization of nonthermal mixture radio frequency discharge
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10.1063/1.3021356
/content/aip/journal/jap/104/12/10.1063/1.3021356
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/12/10.1063/1.3021356

Figures

Image of FIG. 1.
FIG. 1.

Schematic illustration of the experimental setup.

Image of FIG. 2.
FIG. 2.

Typical spectrum recorded from neon-nitrogen admixture at a filling pressure of 0.1 mbar, 70% Ne, and 200 W.

Image of FIG. 3.
FIG. 3.

Boltzmann’s plots for mixture plasma. (a) 60% Ne, 0.1 mbar filling pressure, and 200 W. (b) 80% Ne, 0.4 mbar filling pressure, and 200 W.

Image of FIG. 4.
FIG. 4.

Excitation temperature vis-à-vis neon percentage in the admixture. (a) 0.1 mbar filling pressure. (b) 0.3 mbar filling pressure. (c) 0.5 mbar filling pressure.

Image of FIG. 5.
FIG. 5.

Relative population densities of selected energy levels as a functions of their effective principle quantum number at 60% Ne, 200 W, and pressure at (a) 0.2 mbar, (b) 0.3 mbar, and (c) 0.5 mbar.

Image of FIG. 6.
FIG. 6.

(a) The curve recorded at 60% Ne, 0.3 mbar pressure, and 250 W. (b) The EEDFs for different neon percentage in the mixture at 0.5 mbar pressure and 200 W.

Image of FIG. 7.
FIG. 7.

The rate coefficient associated with the electron impact excitation of ground state of Neon atoms [Eq. (5), —] and its fit [Eq. (7), ----). (a) level with and and (b) level with and .

Image of FIG. 8.
FIG. 8.

Modified Boltzmann plots of mixture plasma at 200 W: (a) 10% Ne and 0.1 mbar pressure and (b) 90% Ne and 0.5 mbar pressure.

Image of FIG. 9.
FIG. 9.

Comparison of electron temperature measured by Langmuir probe technique and modified Boltzmann plot method as a function of neon percentage at 200 W: (a) 0.2 mbar pressure and (b) 0.5 mbar pressure.

Tables

Generic image for table
Table I.

spectral lines and spectroscopic data used to calculate electron temperature measurements.10

Generic image for table
Table II.

Selected neon energy levels and sum for each of excited levels and number of radiative transitions starting in each of the selected neon energy levels.

Generic image for table
Table III.

Variation in exponent and electron number density with pressure at 200 W rf power.

Generic image for table
Table IV.

Comparison between and measured by OES technique as a function of neon percentage and pressure at 200 W RF power.

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/content/aip/journal/jap/104/12/10.1063/1.3021356
2008-12-30
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of nonthermal Ne–N2 mixture radio frequency discharge
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/12/10.1063/1.3021356
10.1063/1.3021356
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