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The role of creep in the time-dependent resistance of Ohmic gold contacts in radio frequency microelectromechanical system devices
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10.1063/1.2953072
/content/aip/journal/jap/104/2/10.1063/1.2953072
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/2/10.1063/1.2953072

Figures

Image of FIG. 1.
FIG. 1.

Resistances across gold-gold contacts as a function of time. Bottom panel: Symbols denote calculated values from Ref. 2. The solid line is a fit of Eq. (2) to the computational data. Top panel: Solid lines are experimental measurements for a closed Ohmic switch in two rf-MEMS devices. Curves denoted I, II, and III correspond to the first, second, and third measurements on switch 1, respectively. The curve denoted by IV is for switch 2. Dashed lines represent fits of Eq. (2) to the experimental data. Except for the early stages of curve IV, the dashed and dotted lines are indistinguishable from one another on this graphing scale.

Image of FIG. 2.
FIG. 2.

Illustration of the conical geometry used in the single asperity model. and are the initial asperity height and radius, respectively, is the angle of the side of the asperity with respect to the surface plane, and and are the time-dependent strain and radius, respectively.

Image of FIG. 3.
FIG. 3.

Curves I–III from Fig. 1 for the first . Symbols are the experimental data; solid lines are the fit of Eq. (2) to each entire data set.

Tables

Generic image for table
Table I.

Resulting parameters from the fit of Eq. (2) to the prior experimental and modeling data.

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/content/aip/journal/jap/104/2/10.1063/1.2953072
2008-07-28
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The role of creep in the time-dependent resistance of Ohmic gold contacts in radio frequency microelectromechanical system devices
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/2/10.1063/1.2953072
10.1063/1.2953072
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