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Role of C in the formation and kinetics of nanovoids induced by implantation in Si
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10.1063/1.2955707
/content/aip/journal/jap/104/2/10.1063/1.2955707
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/2/10.1063/1.2955707
/content/aip/journal/jap/104/2/10.1063/1.2955707
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/content/aip/journal/jap/104/2/10.1063/1.2955707
2008-07-16
2014-07-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Role of C in the formation and kinetics of nanovoids induced by He+ implantation in Si
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/2/10.1063/1.2955707
10.1063/1.2955707
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