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Kinetic mechanism of the thermal-induced self-organization of Au/Si nanodroplets on Si(100): Size and roughness evolution
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10.1063/1.2955784
/content/aip/journal/jap/104/2/10.1063/1.2955784
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/2/10.1063/1.2955784
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic model of the deposited discontinuous film after annealing.

Image of FIG. 2.
FIG. 2.

RBS peaks of the Au for all the samples.

Image of FIG. 3.
FIG. 3.

Representative SEM images for the analyzed samples: (a) as deposited, (b) annealing, (c) annealing, (d) annealing, and (e) annealing.

Image of FIG. 4.
FIG. 4.

Representative noncontact AFM images for the analyzed samples: (a) as deposited, (b) annealing, (c) annealing, (d) annealing, and (e) annealing.

Image of FIG. 5.
FIG. 5.

Derived distribution of the vertical size of the Au/Si nanodroplets: (a) as deposited, (b) annealing, (c) annealing, (d) annealing, and (e) annealing.

Image of FIG. 6.
FIG. 6.

Derived distribution of the horizontal size of the Au/Si nanodroplets: (a) as deposited, (b) annealing, (c) annealing, (d) annealing, and (e) annealing. It is worth to note that for each sample, .

Image of FIG. 7.
FIG. 7.

Derived distribution of the surface-to-surface distance between the Au/Si nanodroplets: (a) as deposited, (b) annealing, (c) annealing, (d) annealing, and (e) annealing.

Image of FIG. 8.
FIG. 8.

(a) Experimental (dots) mean droplet radius as a function of the annealing time and fit (continuous line) by the surface diffusion limited ripening theory. (b) Experimental (dots) mean center-to-center droplets distance as a function of the annealing time and fit (continuous line) by the surface diffusion limited ripening theory and using the experimental determined values of the droplets surface density. (c) Experimental (dots) surface droplets density as a function of the annealing time and theoretical prediction (continuous line) by the surface diffusion limited ripening theory. (d) Experimental (dots) values of the saturated surface roughness of the Au film (as determined by the AFM analyses) as a function of the annealing time. (e) Comparison between the theoretical (continuous, dashed, and dotted curves) mean droplet radius , plotted as a function of annealing time for the cases , , , and the experimental data (dots).

Image of FIG. 9.
FIG. 9.

Experimental (dots) values of the saturated surface roughness of the Au film as a function of the film effective thickness and fit (continuous line) by Eq. (8). The fit parameter resulted .

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/content/aip/journal/jap/104/2/10.1063/1.2955784
2008-07-24
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Kinetic mechanism of the thermal-induced self-organization of Au/Si nanodroplets on Si(100): Size and roughness evolution
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/2/10.1063/1.2955784
10.1063/1.2955784
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