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Linear variation of aluminum nitride capacitance versus voltage induced by a piezoelectric-electrostrictive coupling
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10.1063/1.2964122
/content/aip/journal/jap/104/3/10.1063/1.2964122
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/3/10.1063/1.2964122
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Measured capacitance variation vs bias voltage of a Mo/AlN/Mo capacitor. Inset: (a) axes convention used in the model developed. AlN thin film is considered without the electrodes onto the Si substrate for the mechanical description.

Image of FIG. 2.
FIG. 2.

Measured converse effective permittivity of AlN as a function of in-plane tensile stress. The stress is applied by the controlled flexure of a dedicated sample. One should note that the reported stress did not take into account the residual stresses in AlN as we focus on the curve slope.

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/content/aip/journal/jap/104/3/10.1063/1.2964122
2008-08-11
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Linear variation of aluminum nitride capacitance versus voltage induced by a piezoelectric-electrostrictive coupling
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/3/10.1063/1.2964122
10.1063/1.2964122
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