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High brightness extreme ultraviolet (at 13.5 nm) emission from time-of-flight controlled discharges with coaxial fuel injection
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10.1063/1.2975994
/content/aip/journal/jap/104/5/10.1063/1.2975994
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/5/10.1063/1.2975994
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Experimental setup, cross-sectional view of discharge region.

Image of FIG. 2.
FIG. 2.

Experimental setup, top view.

Image of FIG. 3.
FIG. 3.

Total discharge current, voltage between the electrodes, and in-band EUV signal in the tin vapor discharge at the laser energy of 100 mJ. The distance between the electrodes is 4 mm and between the surface of target and anode edge is 1.0 mm. Timing of injection of the laser pulses and discharge triggering to SG are indicated by arrows.

Image of FIG. 4.
FIG. 4.

Images of ablated tin plasma plum: fresh surface (a), after 30 shots (b).

Image of FIG. 5.
FIG. 5.

In-band EUV Images of tin discharges with the one laser pulse (a) and two laser pulses (b). The first and the second laser pulse energies are 100 and 60 mJ, respectively.

Image of FIG. 6.
FIG. 6.

Total discharge current, voltage between the electrodes, and in-band EUV signal in tin vapor discharge at different energy of the first laser pulse of 50 mJ (a), 90 mJ (b), and 100 mJ (c). The second laser pulse energy is 60 mJ. The distance between the electrodes is 4 mm and between the surface of target and anode edge is 1.0 mm. Timing of the injection of the laser pulses and discharge triggering to SG are indicated by arrows.

Image of FIG. 7.
FIG. 7.

EUV output dependence on the energy of the first laser pulse.

Image of FIG. 8.
FIG. 8.

Spectrum of EUV radiation from the tin vapor discharge with only one laser pulse for fuel ablation (a) and with the second laser pulse for stabilization of the emitter (b). The first and the second laser pulse energies are 100 and 60 mJ, respectively. The dashed lines indicate spectral range of 2% bandwidth at 13.5 nm.

Image of FIG. 9.
FIG. 9.

Total discharge current, voltage between the electrodes, and in-band EUV signal in tin vapor discharge with one laser pulse under in the axial direction. The laser energy is 100 mJ. The distance between the electrodes is 4 mm and between the surface of target and anode edge is 1.0 mm.

Image of FIG. 10.
FIG. 10.

In-band EUV image of the tin vapor discharge with one laser pulse and with .

Image of FIG. 11.
FIG. 11.

Total discharge current, voltage between the electrodes, and in-band EUV signal in the tin vapor discharge with the two laser pulses under .

Image of FIG. 12.
FIG. 12.

In-band EUV image of the tin vapor discharge with two laser pulses and .

Image of FIG. 13.
FIG. 13.

Spectrum of EUV radiation from a tin vapor discharge with two laser pulses and the magnetic field .

Image of FIG. 14.
FIG. 14.

Total discharge current, voltage between the electrodes, and in-band EUV signal in the lithium vapor discharge with two laser pulses.

Image of FIG. 15.
FIG. 15.

In-band EUV image of the lithium vapor discharge with two laser pulses.

Image of FIG. 16.
FIG. 16.

Spectrum of EUV radiation from the lithium vapor discharge with two laser pulses.

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/content/aip/journal/jap/104/5/10.1063/1.2975994
2008-09-09
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High brightness extreme ultraviolet (at 13.5 nm) emission from time-of-flight controlled discharges with coaxial fuel injection
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/5/10.1063/1.2975994
10.1063/1.2975994
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