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Annealing effect on the microstructure modification and tribological properties of amorphous carbon nitride films
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10.1063/1.2978222
/content/aip/journal/jap/104/7/10.1063/1.2978222
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/7/10.1063/1.2978222

Figures

Image of FIG. 1.
FIG. 1.

XPS core-level spectra of carbon nitride film annealing at different temperatures.

Image of FIG. 2.
FIG. 2.

XPS core-level spectra of carbon nitride film annealing at different temperatures.

Image of FIG. 3.
FIG. 3.

The Raman spectra of postdeposited films before and after vacuum annealing at different temperatures. The rectangle at indicates the decreases in peak with increasing annealing temperature.

Image of FIG. 4.
FIG. 4.

The dependence of Raman parameters on annealing temperature. (a) peak, (b) FWHM of peak, (c) peak, (d) FWHM of peak, and (e) .

Image of FIG. 5.
FIG. 5.

FTIR spectra of carbon nitride films. (a) as-deposited, annealing at (b) , (c) , (d) , and (e) . The insert shows the magnification of band of sample [(a), (c), and (e)].

Image of FIG. 6.
FIG. 6.

Coefficient of friction of carbon films after annealing at different temperatures.

Image of FIG. 7.
FIG. 7.

Typical tribological curves of carbon nitride films: no annealing (upper) and after annealing (lower), the inserts (a) and (b) correspond to the contact area on after sliding test, respectively.

Tables

Generic image for table
Table I.

Detailed information of XPS deconvoluted results of present samples after annealing at different temperatures.

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/content/aip/journal/jap/104/7/10.1063/1.2978222
2008-10-09
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Annealing effect on the microstructure modification and tribological properties of amorphous carbon nitride films
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/7/10.1063/1.2978222
10.1063/1.2978222
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