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Phase change nanodots patterning using a self-assembled polymer lithography and crystallization analysis
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10.1063/1.2981070
/content/aip/journal/jap/104/7/10.1063/1.2981070
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/7/10.1063/1.2981070
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic process flow of the experiment. (b) Top view SEM image of porous PS matrix after plasma etching. (c) Statistical size distribution of PMMA holes after plasma etching.

Image of FIG. 2.
FIG. 2.

SEM images of the phase change nanodot arrays for different materials: (a) GeSb nanodots, (b) GST nanodots, and (c) AIST nanodots.

Image of FIG. 3.
FIG. 3.

XRD peak intensity vs temperature results for the 15 nm thick GeSb film (a) and the GeSb nanodot arrays (b). The samples were heated to at . The scan shows the (003) peak for blanket film, while both (003) and (012) peaks were observed for the nanodot sample.

Image of FIG. 4.
FIG. 4.

High resolution TEM image of a single GeSb nanodot after thermal annealing up to . Lattice fringes in the nanodot indicate crystallization.

Image of FIG. 5.
FIG. 5.

XRD peak intensity vs temperature results for the 15 nm thick GST blanket film (a) and the GST nanodot arrays (b). The samples were heated to at . The scan displays two phase transitions for blanket GST film, with peaks (111) and (200) showing up for the metastable fcc phase and (004) and (101) for the stable hexagonal phase. For the nanodot sample, no obvious fcc phase is observed. Some unknown phases show up at high temperature.

Image of FIG. 6.
FIG. 6.

XRD peak intensity vs temperature for the 50 nm thick AIST film (a) and the AIST nanodot arrays (b). The samples were heated to at . The scan shows several peaks at crystallization for blanket AIST sample. For the nanodot sample, no obvious phase is observed from the peak intensity figure. However clear (103) peak does show up in scan.

Image of FIG. 7.
FIG. 7.

scans of AIST nanodot array before and after heating to at .

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/content/aip/journal/jap/104/7/10.1063/1.2981070
2008-10-06
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Phase change nanodots patterning using a self-assembled polymer lithography and crystallization analysis
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/7/10.1063/1.2981070
10.1063/1.2981070
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