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Modifications of yttria fully stabilized zirconia thin films by ion irradiation in the inelastic collision regime
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10.1063/1.3010302
/content/aip/journal/jap/104/9/10.1063/1.3010302
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/9/10.1063/1.3010302

Figures

Image of FIG. 1.
FIG. 1.

Surface morphology of a pristine FSZ film (13A) deposited at 673 K.

Image of FIG. 2.
FIG. 2.

Surface morphology of an initially polycrystalline FSZ film after irradiation with uranium ions of fluence (a) (sample 13L), (b) (sample 13H), and (d) (sample 13VH). In (c), AFM topography image of the same film, as in (b) (rms roughness, 0.5–0.6 nm, is evaluated along the traced lines).

Image of FIG. 3.
FIG. 3.

Surface morphology of initially amorphous FSZ film after irradiation with uranium ions of fluence (a) (15L), (b) (15H), and (c) (sample 15VH).

Image of FIG. 4.
FIG. 4.

GIXRD at incidence angle for as-deposited films and for samples irradiated at different fluences (, , , ). Sample series 15 was deposited at RT and had initially an amorphous structure. Sample series 13 was deposited at and had initially a crystalline structure. For comparison, the diffraction pattern of FSZ powder standard from ICSD file #280134 (from Ref. 19) is also shown.

Image of FIG. 5.
FIG. 5.

XPS spectra of the Zr , Y , and O core levels for as-deposited and irradiated samples (see also Table I).

Tables

Generic image for table
Table I.

Sample parameters of yttria FSZ films before and after being exposed to 2.6 GeV uranium ions ( deposited, fluence, fluence, fluence, and high fluence) including deposition temperature, irradiation fluence, structure according to GIXRD, and relative concentration of Zr, Y, and O as well as Zr/Y and Zr/O ratios deduced from XPS measurements.

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/content/aip/journal/jap/104/9/10.1063/1.3010302
2008-11-13
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Modifications of yttria fully stabilized zirconia thin films by ion irradiation in the inelastic collision regime
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/9/10.1063/1.3010302
10.1063/1.3010302
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