RBS experimental (dots) and simulated (solid line) spectra for ternary samples with (top), (middle), and (bottom).
(a) Atomic incorporation rates, (b) film thickness, and (c) AlN molar fraction as a function of the power applied to the Al target . The dashed lines are only a guide to the eye.
GIXRD patterns for samples as a function of the AlN molar fraction . The main reflections for -TiN (◼) and -AlN (△) phases are indicated at the top of the figure.
Lattice parameter of the ternary cubic phase as a function of extracted from the GIXRD peak positions.
XANES spectra at the N (left), Ti (middle), and Al (right) absorption edges for films with progressive Al incorporation .
(a) Relative intensity of A and B features (see text for details). (b) Energy position of the maximum intensity at the N edge derived from the spectra shown in Fig. 5. The dashed and solid lines are only a guide to the eye.
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