(a) Field emission scanning electron microscope image of the fractured cross-section of a ZrN(3 nm)/ScN(3 nm) multilayer. (b) High resolution x-ray diffraction scans obtained from a series of superlattices with varying periods. The period values, obtained from the satellite reflections in x-ray diffraction patterns, are listed beside the diffraction patterns.
Cross-plane thermal conductivity of 300 nm thick ZrN/ScN (dots) and (squares) multilayers. Superimposed on the plot are horizontal lines corresponding to the experimentally determined lattice component of thermal conductivity (i.e., alloy limit) of different alloys of ZrN, ScN, and , namely, , , and . The data points have an error bar that is equivalent to the size of the markers used to represent the measurement result.
Temperature dependent cross-plane thermal conductivity of 300 nm thick ZrN (0.5 nm)/ScN (0.5 nm) multilayer. The data points have an error bar that is equivalent to the size of the markers used to represent the measurement result.
Cross-plane thermal conductivity of superlattices as a function of tungsten content in the samples. The composition of the superlattices was measured using RBS.
Film composition, thicknesses, measured in-plane electrical resistivity, measured cross-plane thermal conductivity, and calculated lattice contributions to thermal conductivity using the Weidemann–Franz law for (Zr,W,Sc)N control samples analyzed in this work.
The longitudinal speed of sound and the elastic constant of control samples studied in this work.
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