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Atomically smooth and single crystalline heterostructures: Structural and chemical composition study
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) RHEED picture along ; (b) SEM cross section; (c) XRR experimental (black line) and simulated (red line) curves. The inset highlights agreement between XRR fitting and experiment.

Image of FIG. 2.
FIG. 2.

SR-GIXRD (a) in-plane scans at along with (top curve, black) and (bottom curve, red); (b) off-plane scan along the rod from to 2 r.l.u. with ; (c) off-plane scan on the family of Ge {311} planes with .

Image of FIG. 3.
FIG. 3.

(a) TEM cross section along and (b) atomic structure model of a type- Ge(111)/type- heterostructure (please note that the oxide crystal structure has been simplified to the fluorite structure, instead of bixbyite). IF denotes the amorphous Pr-silicate interfacial layer between and Si(111).

Image of FIG. 4.
FIG. 4.

SIMS depth profile of a 170 nm Ge(111)/8 nm heterostructure performed with primary ions (570 eV) (a) before annealing (solid lines and full symbols) and (b) after 30 min at in UHV (dotted lines and empty symbols). Pr-related signal double structure results from presence of a Pr-silicate IF layer.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomically smooth and single crystalline Ge(111)/cubic-Pr2O3(111)/Si(111) heterostructures: Structural and chemical composition study