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Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to
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10.1063/1.3078027
/content/aip/journal/jap/105/3/10.1063/1.3078027
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/3/10.1063/1.3078027

Figures

Image of FIG. 1.
FIG. 1.

Pictures of the microreactor membrane after dielectric breakdown of the silicon nitride layer (a) cracks in the membrane; (b) zoom-in on the location where dielectric breakdown and subsequent hot spot formation occurred.

Image of FIG. 2.
FIG. 2.

Cross-sectional view of Pt/Ta–silicon nitride–silicon structure for study on electrical behavior of silicon nitride at elevated temperatures.

Image of FIG. 3.
FIG. 3.

-characteristics measured on 105 nm and 105 nm SiRN on -type silicon at room temperature (a) and for temperatures up to (b).

Image of FIG. 4.
FIG. 4.

vs characteristics of 105 (up to ) and 200 nm (up to ) on -type silicon. The arrows indicate the voltage sweep direction (equal for all curves). The curves without temperature labels (at the right-hand side of the graph) are measured at 50 and (105 nm), and 20, 75, and (200 nm), respectively.

Image of FIG. 5.
FIG. 5.

vs characteristics of 105 (up to ) and 215 nm (up to ) SiRN on -type silicon. The arrows indicate the voltage sweep direction (equal for all curves).

Image of FIG. 6.
FIG. 6.

Electrical breakdown field as a function of temperature up to for and SiRN films deposited on and substrates.

Tables

Generic image for table
Table I.

Values of the parameters’ pre-exponential factor and the barrier height describing Frenkel–Poole conduction through two types of silicon nitride for various layer thicknesses and temperatures.

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/content/aip/journal/jap/105/3/10.1063/1.3078027
2009-02-09
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/3/10.1063/1.3078027
10.1063/1.3078027
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