SEM images of the diamond surface after irradiation with a 1000 pulse train of 120-fs laser pulses at a rate of 250 kHz with a pulse energy of (a) 72, (b) 80, (c) 120, and (d) 240 nJ. The polarization and the scanning directions are indicated by the dotted and solid arrows, respectively.
(a) Enlarged SEM image of the grooves obtained at a pulse energy of 72 nJ. (b) SEM image of grooves of several hundred micrometers length.
(a) SEM image of the cross section the periodic surface structure after etching by focused ion beam. (b) SEM image of the center part of a pillar after focused ion beam etching. The SEM images were obtained at an angle of 45° and 30° from the diamond surface, respectively.
Micro-Raman spectra of the irradiated (black) and unirradiated (gray) areas a laser-processed diamond sample.
SEM image of the diamond surface processed sequentially using two scanning directions at 0° (bold arrow) and 300° (dotted arrow).
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