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Fe-Al interface intermixing and the role of Ti, V, and Zr as a stabilizing interlayer at the interface
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10.1063/1.3079521
/content/aip/journal/jap/105/5/10.1063/1.3079521
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/5/10.1063/1.3079521

Figures

Image of FIG. 1.
FIG. 1.

RBS spectra (open circles) obtained for ions incident on on a Si wafer (upper curve) and on a Si wafer (lower curve) at an ion energy of 1290 keV. The solid lines are simulated curves of the respective RBS spectra calculated using SIMNRA.

Image of FIG. 2.
FIG. 2.

XRR specular scans (open circles) and BEDE simulations (solid lines) for bilayer films of Fe/Al (upper curve) and Al/Fe (lower curve).

Image of FIG. 3.
FIG. 3.

XRR diffuse scans (open circles) and BEDE simulations (solid lines) for bilayer films of Fe/Al (left curve) and Al/Fe (right curve).

Image of FIG. 4.
FIG. 4.

XRR specular scans (open circles) and BEDE simulations (solid lines) for multilayer films with (a) Fe/3 Å Ti/Al, (b) Fe/9 Å V/Al, and (c) Fe/6 Å Zr/Al in order of top to bottom.

Image of FIG. 5.
FIG. 5.

XRR specular scans (open circles) and BEDE simulations (solid lines) for multilayer films with (a) Al/3 Å Ti/Fe, (b) Al/9 Å V/Fe, and (c) Al/6 Å Zr/Fe in order of top to bottom.

Tables

Generic image for table
Table I.

Layer structure, thickness, total roughness , and chemical roughness of individual layers determined by fitting RBS and XRR spectra for (a) on Si and (b) on Si.

Generic image for table
Table II.

Layer structure and thickness of individual layers determined by fitting XRR spectra for (a) on Si and (b) on Si.

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/content/aip/journal/jap/105/5/10.1063/1.3079521
2009-03-04
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fe-Al interface intermixing and the role of Ti, V, and Zr as a stabilizing interlayer at the interface
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/5/10.1063/1.3079521
10.1063/1.3079521
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