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Structural and electric properties of thin films with different annealing conditions
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10.1063/1.3055400
/content/aip/journal/jap/105/6/10.1063/1.3055400
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/6/10.1063/1.3055400

Figures

Image of FIG. 1.
FIG. 1.

XRD patterns of SZO films annealed in (a) oxygen and (b) nitrogen ambients.

Image of FIG. 2.
FIG. 2.

Frequency dependence of dielectric constant and dielectric loss measured at room temperature for (a) SZOO and (b) SZON films.

Image of FIG. 3.
FIG. 3.

Temperature dependence of dielectric constant and dielectric loss measured at various frequencies of , , and for the (a) SZOO and (b) SZON films annealed at .

Image of FIG. 4.
FIG. 4.

Electric field dependent leakage current density of (a) SZOO and (b) SZON films annealed at 600, 650, 700, and .

Tables

Generic image for table
Table I.

Dielectric constants of SZOO and SZON films with different annealing temperatures and measuring frequencies.

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/content/aip/journal/jap/105/6/10.1063/1.3055400
2009-03-16
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural and electric properties of SrZrO3 thin films with different annealing conditions
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/6/10.1063/1.3055400
10.1063/1.3055400
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