Sample geometry. The implantation region is of dimensions by .
AFM image of the contrast pattern produced on the PMMA after gold implantation at a dose of . Electron beam dose was from 10 to .
TRIDYN simulations for samples with gold doses of (a) , (b) , (c) , and (d) showing the depth profiles.
curve for PMMA sample gold-implanted at a dose of .
In vacuo conductivity of gold-implanted PMMA as a function of dose.
Lithographic contrast curve—normalized resist thickness (polymer thickness remaining after electron beam exposure, divided by the original polymer thickness) as a function of the logarithm of electron exposure dose. The curve plotted is the average over all implantation doses investigated here.
Article metrics loading...
Full text loading...