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Gold-implanted shallow conducting layers in polymethylmethacrylate
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10.1063/1.3088874
/content/aip/journal/jap/105/6/10.1063/1.3088874
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/6/10.1063/1.3088874
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Sample geometry. The implantation region is of dimensions by .

Image of FIG. 2.
FIG. 2.

AFM image of the contrast pattern produced on the PMMA after gold implantation at a dose of . Electron beam dose was from 10 to .

Image of FIG. 3.
FIG. 3.

TRIDYN simulations for samples with gold doses of (a) , (b) , (c) , and (d) showing the depth profiles.

Image of FIG. 4.
FIG. 4.

curve for PMMA sample gold-implanted at a dose of .

Image of FIG. 5.
FIG. 5.

In vacuo conductivity of gold-implanted PMMA as a function of dose.

Image of FIG. 6.
FIG. 6.

Lithographic contrast curve—normalized resist thickness (polymer thickness remaining after electron beam exposure, divided by the original polymer thickness) as a function of the logarithm of electron exposure dose. The curve plotted is the average over all implantation doses investigated here.

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/content/aip/journal/jap/105/6/10.1063/1.3088874
2009-03-24
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Gold-implanted shallow conducting layers in polymethylmethacrylate
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/6/10.1063/1.3088874
10.1063/1.3088874
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