Surface morphology and cross-section profile of AFM before and after Ar-GCIB irradiation with acceleration energy of 20 keV. The ion doses were (b) and (c) .
Cross-sectional TEM view of grooves on amorphous carbon after irradiation of Ar-GCIB (acceleration energy: 20 keV; ion dose: and ).
Dependence of the reduction in carbon roughness power spectral intensity on groove interval.
EDS of (a) amorphous carbon and (b) magnetic layer after Ar-GCIB irradiation with an ion dose of .
Cross-sectional TEM image of the patterned Si with carbon overcoat after Ar-GCIB irradiation (acceleration ; ion ). AFM images of before and after Ar-GCIB irradiation are also presented.
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