Experimental setup: (a) sideview of the 1m diameter cylindrical chamber, with position of the components approximately to scale; the magnetron discharge was assisted by a CPS; (b) top view of the discharge region, with the plasma schematically indicated.
Example of a time-dependent, medium-length HiPIMS current pulse, at constant voltage, with a Nb-target at an argon pressure of 0.4 Pa.
Current pulses (bottom) at constant chamber pressure of 0.12 Pa and nominally constant voltage pulses (top) for different pulse repetition rates ( Nb target, argon gas).
Peak current-constant voltage characteristics for constant pulse length of and different pulse repetition rates ( Nb target, argon gas at 0.12 Pa).
Lower limit of gas pressure needed for stable pulsed magnetron operation with the boundary conditions of 1000 V maximum voltage, 1000 W maximum average power, and pulse length ( Nb target, argon gas).
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