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Elastic constants of the silicon nanobeam as a function of the thickness. The inset shows the thickness-dependent variation of Young’s modulus at several tens of nanometer.
The piezoresistive coefficient of the silicon nanobeam with the elastic constant correction (open squares) and without the elastic constant correction (solid squares) as a function of temperature.
Luttinger parameters, deformation potentials, spin-orbit split-off energy, permittivity, and doping concentration used in the calculation.
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