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Effect of temperature and elastic constant on the piezoresistivity of silicon nanobeams
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10.1063/1.3086656
/content/aip/journal/jap/105/8/10.1063/1.3086656
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/8/10.1063/1.3086656

Figures

Image of FIG. 1.
FIG. 1.

Elastic constants of the silicon nanobeam as a function of the thickness. The inset shows the thickness-dependent variation of Young’s modulus at several tens of nanometer.

Image of FIG. 2.
FIG. 2.

The piezoresistive coefficient of the silicon nanobeam with the elastic constant correction (open squares) and without the elastic constant correction (solid squares) as a function of temperature.

Tables

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Table I.

Luttinger parameters, deformation potentials, spin-orbit split-off energy, permittivity, and doping concentration used in the calculation.

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/content/aip/journal/jap/105/8/10.1063/1.3086656
2009-04-16
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of temperature and elastic constant on the piezoresistivity of silicon nanobeams
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/8/10.1063/1.3086656
10.1063/1.3086656
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