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Structural analysis of a multilayer: Investigation of sub-nanometric layers by tomographic atom probe
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Image of FIG. 1.
FIG. 1.

SEM of an atom probe specimen. The seven sequences of the multilayer are revealed in the bright contrast at the top of the tip.

Image of FIG. 2.
FIG. 2.

X-ray refletometry curves obtained between 0° and 6° for the multilayer. The experimental and fitted curves are in open circles and continuous line, respectively.

Image of FIG. 3.
FIG. 3.

Mass spectrum of the multilayer obtained by LATAP, (a) between 20 and 110 uma showing all peaks, (b) between 20 and 40 uma to characterize the and peaks, and (c) between 93 and 105 uma to characterize the five peaks and two peaks.

Image of FIG. 4.
FIG. 4.

3D reconstruction of an analyzed volume representing one sequence of the multilayer. The spatial distribution of IrMn, Pt, and Co atoms shows the strong intermixing between the Co, IrMn, and Pt atoms at the IrMn/Co interface and the very low intermixing between Pt and IrMn atoms at the IrMn/Pt interface.

Image of FIG. 5.
FIG. 5.

(a) 3D reconstruction of one sequence of the multilayer showing the spatial distribution of Mn, Ir, Pt, and Co atoms. (b) Position of Pt atoms in the multilayer, the Pt atomic planes in the regions that correspond to the and layers deposited on Co layers are evidenced.

Image of FIG. 6.
FIG. 6.

Concentrations profiles of Pt, Co, and Mn atoms across the interfaces. The numerical values are in nanometers.

Image of FIG. 7.
FIG. 7.

Model of concentration profile of the 0.4 nm and layers surrounded by two Pt layers (a) with perfectly smooth interfaces and (b) with one atomic plane of Pt–Co intermixing on each side. (c) Model of concentration profile of the strongly intermixed layer.

Image of FIG. 8.
FIG. 8.

(a) Fitted and experimental concentration profiles representing the three Co peaks. The fitted curve is deduced from the convolution model. (b) Repartition of the Co atoms in the three Co layers deduced from the Co modeled concentration profile.


Generic image for table
Table I.

Thickness and roughness of the different layers in the multilayer measured with x-ray reflectometry. The values reported for the sequence correspond to the mean values obtained for the seven sequences fitted separately.

Generic image for table
Table II.

Thickness and intermixing zone of the different layers in the multilayer, deduced from the concentration profiles of the LATAP analysis. The values of the , , and layers thickness correspond to the difference between two maxima of Co peaks from which the Co–Pt intermixing can be removed to obtain the nonmixed part of the Pt layers. The thickness of the and layers corresponds to the Co layer central part (approximately two atomic planes, ) containing the higher Co amount.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural analysis of a (Pt/Co)3/IrMn multilayer: Investigation of sub-nanometric layers by tomographic atom probe