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Hydrogen quantification in hydrogenated amorphous carbon films by infrared, Raman, and x-ray absorption near edge spectroscopies
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10.1063/1.3103326
/content/aip/journal/jap/105/9/10.1063/1.3103326
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/9/10.1063/1.3103326
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

RBS spectrum of the -C:H film grown at an applied substrate bias, , of . The inset shows the simultaneously recorded ERDA spectrum (closed triangles) together with ERDA spectra taken from the Mylar foil (open circles) and the -C:H film grown at (open squares).

Image of FIG. 2.
FIG. 2.

ERDA H content of the -C:H films as a function of the applied substrate bias voltage.

Image of FIG. 3.
FIG. 3.

Background subtracted IR absorption spectra of -C:H films deposited with varying applied substrate bias.

Image of FIG. 4.
FIG. 4.

(a) Raman spectra of -C:H films deposited with varying applied substrate bias voltages (in volts). (b) Raman signal of the -C:H film grown at with indicated linear PL background.

Image of FIG. 5.
FIG. 5.

XANES spectra of -C:H films deposited with varying applied substrate bias. The reference spectra of HOPG, diamond, and ta-C are added in the lower part of the figure. The determination of the intensity of the states, , is indicated for the -C:H films grown at and .

Image of FIG. 6.
FIG. 6.

Correlation between hydrogen content measured by ERDA and (a) the normalized IR (C–H) band area at about , (b) the Raman PL background, and (c) the XANES band intensity. The dashed lines represent the linear best fits through the data points from which the empirical expressions (1), (2), and (4) are derived (see text). The closed squares, open triangles, and solid line in (b) represent the four data points obtained by ERDA directly, the two data points obtained by interpolation of the ERDA data in Fig. 2, and the expression between PL background and hydrogen content (3) found by Casiraghi et al. (Ref. 10), respectively.

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/content/aip/journal/jap/105/9/10.1063/1.3103326
2009-05-05
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogen quantification in hydrogenated amorphous carbon films by infrared, Raman, and x-ray absorption near edge spectroscopies
http://aip.metastore.ingenta.com/content/aip/journal/jap/105/9/10.1063/1.3103326
10.1063/1.3103326
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