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Enhanced efficiency of laser shock cleaning process by geometrical confinement of laser-induced plasma
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10.1063/1.3160315
/content/aip/journal/jap/106/1/10.1063/1.3160315
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/1/10.1063/1.3160315
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Structures for plasma confinement: (a) flat plate, (b) normal shock tube, and (c) converging shock tube.

Image of FIG. 2.
FIG. 2.

Schematic diagram of the experimental setup.

Image of FIG. 3.
FIG. 3.

Cleaning samples ( PS particles on Si wafers): (a) optical microscope image and (b) SEM image of a single PS particle.

Image of FIG. 4.
FIG. 4.

Development of the LIP shock wave in the standard LSC process at (a) , (b) , and (c) . The gray scales are in arbitrary units.

Image of FIG. 5.
FIG. 5.

Pressure distribution of various confining geometries (irradiance , scale bar: ): (a) plane confinement (, ), (b) normal shock tube (, , , ), and (c) converging shock tube (, , , , , ). The gray scales are in arbitrary units.

Image of FIG. 6.
FIG. 6.

Maximum pressure as a function of gap distance at : (a) no confinement, (b) plane confinement , (c) plane confinement , (d) normal shock tube (, , , ), (e) normal shock tube (, , , ), (f) normal shock tube , , , ), and (g) converging shock tube (, , , , , ).

Image of FIG. 7.
FIG. 7.

Development of the LIP shock wave for at (a) , (b) , and (c) . The gray scales are in arbitrary units.

Image of FIG. 8.
FIG. 8.

Development of the LIP shock wave for at (a) 300, (b) 500, and (c) . The gray scales are in arbitrary units.

Image of FIG. 9.
FIG. 9.

Pressure distribution on the sample surface for (a) no confinement and (b) plane confinement ( and ).

Image of FIG. 10.
FIG. 10.

Maximum pressure acting on the sample surface: (a) no confinement , (b) , , and (c) , .

Image of FIG. 11.
FIG. 11.

Measured peak pressure and the corresponding enhancement ratio as a function of the gap distance (, ).

Image of FIG. 12.
FIG. 12.

Optical micrographs of Si-wafer surfaces after the LSC processes (20 pulses, , ): (a) no confinement, (b) plane confinement , (c) plane confinement , and (d) plane confinement .

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/content/aip/journal/jap/106/1/10.1063/1.3160315
2009-07-14
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Enhanced efficiency of laser shock cleaning process by geometrical confinement of laser-induced plasma
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/1/10.1063/1.3160315
10.1063/1.3160315
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