Scheme of the experimental apparatus. O.I.: optical isolator; AOM: acousto-optic modulator; EOM: electro-optic modulator; H: half-wave plate; Q: quarter-wave plate; PD: photodiode; PBS: polarizing beam splitter; BS: beam splitter. The inset shows a drawing of the sample and cavity mirror holder: on the top, the translating stage holding the input mirror; the Si wafer with the MEMS is fixed from the bottom side of the device.
Optomechanical characterization of the fundamental mode of the MEMS membrane at room temperature. (a) Amplitude of the mechanical response of the cavity length to a modulation of the intracavity power. (b) Phase portrait given by the quadratures of the response. (c) Spectral density of the cavity length fluctuations. The thin solid lines show the corresponding fit with Eq. (1) for the response and Eq. (2) for the spectrum.
The same as in Fig. 2 for the second mode of the membrane.
Optomechanical characterization of the fundamental mode at cryogenic temperature (see the caption of Fig. 2 for the description).
Spectral density of the displacement noise around the fundamental mode resonance for different values of the power of the pump laser that is used for active cooling. (a) Room temperature: from dark to light lines, the corresponding pump power values measured before the cavity are 0, 1.8 mW, 3.6 mW, 7.5 mW, and 13.3 mW. (b) Cryogenic temperature: from dark to light lines, the pump power values are 0, 0.9 mW, 1.3 mW, and 2.4 mW. In the inset: the corresponding behavior of the effective temperature.
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