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Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings
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10.1063/1.3267147
/content/aip/journal/jap/106/11/10.1063/1.3267147
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/11/10.1063/1.3267147
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Figures

Image of FIG. 1.
FIG. 1.

The SEM images of (a) 500 nm PS NS monolayer and Si NRAs with (b) 303 nm, (c) 200 nm, and (d) 145 nm in diameters. (e) The etching time of oxygen plasma for PS vs the diameter of PS.

Image of FIG. 2.
FIG. 2.

(a) Total reflectance over a range from 350 to 850 nm for diameter-controlled NRAs. The root mean square roughness is plotted as a function of the filling factor, which is related to the diameter of NRAs.

Image of FIG. 3.
FIG. 3.

The reflectance of diameter-controlled NRAs as a function of AOI using (a) unpolarized and (b) s-, and (c) p-polarized lights with 650 nm wavelength. (d) The reflectance ratio of polarization as a function of AOI.

Image of FIG. 4.
FIG. 4.

The CAs for the diameter-controlled NRAs. The insets are corresponding photographs of water droplets on the surfaces of Si NRA layers.

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/content/aip/journal/jap/106/11/10.1063/1.3267147
2009-12-04
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/11/10.1063/1.3267147
10.1063/1.3267147
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