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Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy
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10.1063/1.3156689
/content/aip/journal/jap/106/2/10.1063/1.3156689
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/2/10.1063/1.3156689
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

As received XPS spectra of ta-C films confirming high content in the films.

Image of FIG. 2.
FIG. 2.

HREELS spectrum of (a) as-received nonhydrogenated ta-C films, (b) after microwave hydrogen plasma treatment for 30 s, and (c) after microwave hydrogen plasma treatment for 90 s.

Image of FIG. 3.
FIG. 3.

The low kinetic energy part of the UPS spectra in ta-C films after different treatments: as-prepared (filled circles), hydrogenated (hollow circles), hydrogenated and after annealing at (filled triangles), (hollow triangles), (filled squares), (hollow squares). All spectra were recorded at normal emission with photon energy of 60 eV.

Image of FIG. 4.
FIG. 4.

Field emission current density against applied field for the ta-C films (a) as prepared, (b) after 90 s hydrogen treatment, and (c) after hydrogen plasma and after annealing. No emission current was obtained from as-prepared pristine as well as the after annealed ta-C films. The insert shows the Fowler–Nordheim plot for the electron emission process after 90 s hydrogen treatment, where a linear line can be plotted.

Image of FIG. 5.
FIG. 5.

AFM images of surface of ta-C film (a) as prepared, (b) after H plasma treatment, and (c) after H plasma treatment then annealing at . The scanned areas are all and the height scale is 5 nm.

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/content/aip/journal/jap/106/2/10.1063/1.3156689
2009-07-16
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/2/10.1063/1.3156689
10.1063/1.3156689
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