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Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy
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10.1063/1.3156689
/content/aip/journal/jap/106/2/10.1063/1.3156689
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/2/10.1063/1.3156689
/content/aip/journal/jap/106/2/10.1063/1.3156689
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/content/aip/journal/jap/106/2/10.1063/1.3156689
2009-07-16
2014-10-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/2/10.1063/1.3156689
10.1063/1.3156689
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