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Stabilization of very high- tetragonal phase in Ge-doped films grown by atomic oxygen beam deposition
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10.1063/1.3182636
/content/aip/journal/jap/106/2/10.1063/1.3182636
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/2/10.1063/1.3182636
/content/aip/journal/jap/106/2/10.1063/1.3182636
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/content/aip/journal/jap/106/2/10.1063/1.3182636
2009-07-28
2014-10-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stabilization of very high-k tetragonal phase in Ge-doped ZrO2 films grown by atomic oxygen beam deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/2/10.1063/1.3182636
10.1063/1.3182636
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