Temperature dependent characteristics with monitor current measured at a fixed low voltage.
Leakage current transients during long-term CVS measurements at for selected stress voltages. The monitor voltages are 1.8 and −1.6 V, respectively, for (a) positive bias and (b) negative bias on BE.
Weibull distributions of the hard breakdown measured at for (a) positive bias and (b) negative bias on BE.
Voltage acceleration results from long-term CVS measurements at , showing an almost symmetric depending on the polarity of the bias voltage. The data can be fitted well using the power-law model. The inset figure shows the fitting to linear- model in high and low voltage regions, respectively.
Voltage acceleration measured at 30, 75, and , showing an increase in acceleration parameter, (1/V), with decreasing temperature. Solid lines represent fitting to the linear- model.
Stress voltage dependence of the apparent activation energy of TDDB lifetime, showing an increase in with decreasing stress voltage.
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