SEM images of AlInN samples under different flow rate in the main route : (a) 0.5, (b) 1, and (c) 1.4 SLM. The characters 1, 2, and 3 mean the substrate positions 92, 118, and 144 mm from MO entrance. The length of white scale bar is .
XRD spectra of AlInN grown in position 3 with different gas flow rate in main route . values are given inset. The Al-rich AlInN produced by phase separation is indicated by arrows.
For the major composition, i.e., In-rich AlInN with : (a) (above) Al content obtained by Vegard’s law. (b) (below) FWHM in (0002) and scan as a function of . The shade regions are the phase separation zones.
Raman spectra of AlInN grown in position 3 with different gas flow rate in main route . The spectra in for SLM sample is magnified and displayed inset.
Phase diagram concerning and Al composition. The parts of composition curve deep in phase separation zones are plotted in dotted curve.
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