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Effect of gas flow on the growth of In-rich AlInN films by metal-organic chemical vapor deposition
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10.1063/1.3212969
/content/aip/journal/jap/106/5/10.1063/1.3212969
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/5/10.1063/1.3212969
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM images of AlInN samples under different flow rate in the main route : (a) 0.5, (b) 1, and (c) 1.4 SLM. The characters 1, 2, and 3 mean the substrate positions 92, 118, and 144 mm from MO entrance. The length of white scale bar is .

Image of FIG. 2.
FIG. 2.

XRD spectra of AlInN grown in position 3 with different gas flow rate in main route . values are given inset. The Al-rich AlInN produced by phase separation is indicated by arrows.

Image of FIG. 3.
FIG. 3.

For the major composition, i.e., In-rich AlInN with : (a) (above) Al content obtained by Vegard’s law. (b) (below) FWHM in (0002) and scan as a function of . The shade regions are the phase separation zones.

Image of FIG. 4.
FIG. 4.

Raman spectra of AlInN grown in position 3 with different gas flow rate in main route . The spectra in for SLM sample is magnified and displayed inset.

Image of FIG. 5.
FIG. 5.

Phase diagram concerning and Al composition. The parts of composition curve deep in phase separation zones are plotted in dotted curve.

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/content/aip/journal/jap/106/5/10.1063/1.3212969
2009-09-14
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of gas flow on the growth of In-rich AlInN films by metal-organic chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/5/10.1063/1.3212969
10.1063/1.3212969
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