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Magnetic soft x-ray holography study of focused ion beam-patterned Co/Pt multilayers
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10.1063/1.3246724
/content/aip/journal/jap/106/8/10.1063/1.3246724
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/8/10.1063/1.3246724
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic side view of the sample-mask structure. The blue layer corresponds to the membrane, the yellow areas illustrate the gold and the gray areas the palladium layers. On the bottom side of the membrane the Co/Pt multilayer is sputter-deposited. The wide object hole is milled down to the membrane, while the pinholes are milled through the whole structure. The green arrows indicate the direction of the ions used for FIB milling. b) SEM image of the holography mask. Five reference pinholes are milled at a radial distance of from the center of the object hole in the middle of the structure.

Image of FIG. 2.
FIG. 2.

Typical erosion sequence obtained by FIB milling the object hole into the Au/Pd structure. The secondary electron (SE) signal is plotted as a function of the area dose. The higher SE signal corresponds to the higher electron yield of Pd for ions with an energy of 30 keV. The Au and Pd layers are indicated in yellow and gray as in Fig. 1(a).

Image of FIG. 3.
FIG. 3.

Experimental setup at the beamline ID08 (ESRF).

Image of FIG. 4.
FIG. 4.

(a) Magnetic hologram, i.e., difference of two holograms of opposite helicity (logarithmic pseudocolor scale), (b) Fourier transform of image (a) with phases encoded in the color scale and amplitude represented by the intensity, (c) real part of image (b), and (d) imaginary part of image (b).

Image of FIG. 5.
FIG. 5.

(a) Magnetic hologram with filter for the beam-stop area and continuous continuation of the beam-stop wire (logarithmic color scale), (b) Fourier transform of image (a) (color: phases, intensity: amplitude) with subsequent multiplication with a plane wave (inset), (c) real part of image (b), and (d) imaginary part of image (b).

Image of FIG. 6.
FIG. 6.

Schematic view (slice through the center) of a FIB-structured Co/Pt multilayer film with stripes of increasing ion dose (light green: low dose, dark green: high dose).

Image of FIG. 7.
FIG. 7.

(a) Domain image of a Co/Pt sample structured with stripes of increasing ion dose, labeled (1)–(4), at remanence, (b) SEM image of the sample.

Image of FIG. 8.
FIG. 8.

Reconstructed images at different magnetic fields of the Co/Pt sample from Fig. 7. During a part of the hysteresis loop the domain configuration evolves toward remanence after saturation in a negative magnetic field.

Image of FIG. 9.
FIG. 9.

Schematic cross section (slice through the center) of an antidot array patterned into a Co/Pt multilayer film. Green arrows indicate the direction of the ions.

Image of FIG. 10.
FIG. 10.

(a) SEM image of a 200 nm antidot array created with an ion point dose of and (b) domain image showing a domain structure similar to the maze pattern of unstructured samples.

Image of FIG. 11.
FIG. 11.

(a) SEM image of a 200 nm antidot array created with an ion point dose of , (b) domain image showing a checkerboardlike domain structure, and (c) magnification of the rectangular region marked in red in (b).

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/content/aip/journal/jap/106/8/10.1063/1.3246724
2009-10-27
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Magnetic soft x-ray holography study of focused ion beam-patterned Co/Pt multilayers
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/8/10.1063/1.3246724
10.1063/1.3246724
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