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Composition influence on the physical and electrical properties of -based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes
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10.1063/1.3246835
/content/aip/journal/jap/106/9/10.1063/1.3246835
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/9/10.1063/1.3246835
/content/aip/journal/jap/106/9/10.1063/1.3246835
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/content/aip/journal/jap/106/9/10.1063/1.3246835
2009-11-02
2015-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Composition influence on the physical and electrical properties of SrxTi1−xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes
http://aip.metastore.ingenta.com/content/aip/journal/jap/106/9/10.1063/1.3246835
10.1063/1.3246835
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