Technological steps of the PSi microarray fabrication process.
Scheme of the functionalization process of the PSi microarray surface, from the Piranha incubation to the covalent attachment of the DNA single strand.
(a) Optical microscope images of the Bragg reflectors microarray; in the inset, a zoom on few elements with the diameter measurement. (b) SEM characterization of one microchamber. In the first inset, a particular of the microchamber wall and the silicon nitride mask layer. In the second inset the structure of the porous layers.
Reflectivity spectra of the PSi Bragg reflectors.
FTIR spectrum of the PSi surface after the functionalization process.
(a) Reflectivity spectra of the Bragg reflectors before and after the thermal oxidation process, after the APTES and GA functionalization, and after the DNA probe attachment. (b) The correspondent optical microscope images of the Bragg reflectors microarray.
(a) Reflectivity spectra of a PSi Bragg reflector element before (black line) and after (red line) the interaction with noncomplementary DNA, and after (green line) the hybridization with the complementary single-stranded DNA. (b) The correspondent optical microscope images.
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