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Growth, microstructure, and field-emission properties of synthesized diamond film on adamantane-coated silicon substrate by microwave plasma chemical vapor deposition
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10.1063/1.3427436
/content/aip/journal/jap/107/10/10.1063/1.3427436
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/10/10.1063/1.3427436
View: Figures

Figures

Image of Scheme 1.
Scheme 1.

Schematic diagram showing diamond synthesis in two steps; (i) adamantane deposited on silicon surface by hotplate method, and (ii) diamond growth by MPCVD.

Image of FIG. 1.
FIG. 1.

(a) Optical image, inset: high-magnification image of the adamantane, (b) XRD pattern of adamantane, and (c) Raman spectrum of the adamantane coating layer on Si (100) substrate.

Image of FIG. 2.
FIG. 2.

Plan-view SEM images and micro-Raman spectra after growth for deposition times of (a) and (c) 15 min, (b) and (d) 30 min, and (c) and (f) 45 min.

Image of FIG. 3.
FIG. 3.

Raman spectra of adamantane-coated Si substrates after 15, 30, and 45 min deposition.

Image of FIG. 4.
FIG. 4.

XRD patterns of adamantane-coated Si substrates after 15, 30, and 270 min deposition.

Image of FIG. 5.
FIG. 5.

Cross-sectional SEM images of adamantane-coated Si substrates treated with various times: (a) 15 min, (b) 30 min, and (c) 45 min.

Image of FIG. 6.
FIG. 6.

SEM images of deposited diamond in (a) plan–view and (b) cross-section view, inset: high-magnification image of interlayer, (c) Raman spectrum after synthesized diamond (growth time 270 min) on Si surface pretreated with adamantane.

Image of FIG. 7.
FIG. 7.

(a) AFM and (b) corresponding Raman spectrum of plane region where we did not observe microdiamond film after 270 min diamond growth.

Image of FIG. 8.
FIG. 8.

The XPS survey spectrum of diamond/Si, inset: high-resolution spectrum of the region.

Image of FIG. 9.
FIG. 9.

Emission current density as a function of applied electrical field for diamond plates and inset corresponding F–N plot.

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/content/aip/journal/jap/107/10/10.1063/1.3427436
2010-05-24
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Growth, microstructure, and field-emission properties of synthesized diamond film on adamantane-coated silicon substrate by microwave plasma chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/10/10.1063/1.3427436
10.1063/1.3427436
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