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Transport and charging mechanisms in thin films for capacitive RF MEMS switches application
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10.1063/1.3407542
/content/aip/journal/jap/107/11/10.1063/1.3407542
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/11/10.1063/1.3407542
/content/aip/journal/jap/107/11/10.1063/1.3407542
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/content/aip/journal/jap/107/11/10.1063/1.3407542
2010-06-01
2014-07-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Transport and charging mechanisms in Ta2O5 thin films for capacitive RF MEMS switches application
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/11/10.1063/1.3407542
10.1063/1.3407542
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