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Resistive switching characteristics and mechanisms of Pt-embedded memory devices
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10.1063/1.3437635
/content/aip/journal/jap/107/12/10.1063/1.3437635
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/12/10.1063/1.3437635
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) The XRD patterns of W/O E-Pt, E-Pt, and E-Pt SZO thin films, and the inset is Pt depth profile of E-Pt and E-Pt SZO thin films characterized by SIMS analysis. (b) The cross-sectional HRTEM image of E-Pt thin film indicates that Pt metal layer is embedded within SZO thin film. (c) The cross-sectional HRTEM image of E-Pt thin film shows that the E-Pt interdiffusion into SZO thin film takes place after PA process. (d) The binding energy of Pt in E-Pt SZO thin film at various sputtering time of ion bombardment.

Image of FIG. 2.
FIG. 2.

The typical curves of W/O E-Pt, E-Pt, and E-Pt memory devices, and the inset is the statistical plot of of W/O E-Pt, E-Pt, and E-Pt SZO memory devices.

Image of FIG. 3.
FIG. 3.

(a) The plot of as a function of of the HRS currents for W/O E-Pt, E-Pt, and E-Pt memory devices, and the inset is the plot of vs of the HRS currents of E-Pt and E-Pt memory devices. (b) The plot of vs of the LRS currents of W/O E-Pt, E-Pt, and E-Pt memory devices.

Image of FIG. 4.
FIG. 4.

The schematic diagram of resistive switching mechanism of SZO memory devices with E-Pt process (a) HRS current is dominated by Ohmic conduction , showing the conduction electrons passing through the tiny local conducting filaments consisting of E-Pt clusters, (b) HRS current is dominated by F–P emission , showing the conduction electrons hopping through the oxygen vacancies, and (c) conduction electrons passes through conducting filaments connecting TE and BE, switching the memory state from HRS to LRS.

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/content/aip/journal/jap/107/12/10.1063/1.3437635
2010-06-28
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Resistive switching characteristics and mechanisms of Pt-embedded SrZrO3 memory devices
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/12/10.1063/1.3437635
10.1063/1.3437635
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