1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Powder formation in discharge in large area capacitively coupled reactors: A study of the combined effect of interelectrode distance and pressure
Rent:
Rent this article for
USD
10.1063/1.3282802
/content/aip/journal/jap/107/2/10.1063/1.3282802
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/2/10.1063/1.3282802
/content/aip/journal/jap/107/2/10.1063/1.3282802
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/jap/107/2/10.1063/1.3282802
2010-01-25
2014-09-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Powder formation in SiH4–H2 discharge in large area capacitively coupled reactors: A study of the combined effect of interelectrode distance and pressure
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/2/10.1063/1.3282802
10.1063/1.3282802
SEARCH_EXPAND_ITEM