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Powder formation in discharge in large area capacitively coupled reactors: A study of the combined effect of interelectrode distance and pressure
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10.1063/1.3282802
/content/aip/journal/jap/107/2/10.1063/1.3282802
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/2/10.1063/1.3282802
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Scanning electron micrograph of Si powder particle contamination during film deposition.

Image of FIG. 2.
FIG. 2.

Top view of the experimental arrangement. Silane depletion fraction was measured by FTIR absorption spectroscopy in the exhaust pipe of the deposition reactor and light scattering was conducted using a 488 nm beam injected through the pumping pipe into the reactor. The scattered light was then collected from a view port orthogonally to the incident beam.

Image of FIG. 3.
FIG. 3.

Schematic view of the light scattering optical setup.

Image of FIG. 4.
FIG. 4.

(a) Emission spectrum of a discharge, (b) typical view from the lateral view port, (c) acquisition during plasma, and (d) acquisition 20 ms after plasma extinction.

Image of FIG. 5.
FIG. 5.

Branching ratio for silane utilization. Silane can be either pumped, deposited, or transformed into powder.

Image of FIG. 6.
FIG. 6.

Effect of the pressure on the silane utilization branching ratio for a 25 mm interelectrode distance. The gray bars represent the fraction of transformed into powder.

Image of FIG. 7.
FIG. 7.

Scattering experiments as a function of pressure for . (a) Light scattering after plasma extinction and (b) plasma emission at 488 nm. Note that gray scale is different for the two columns.

Image of FIG. 8.
FIG. 8.

Light scattering experiments for (left), 15 and 10 (right) mm for pressures between 1.5 (top) and 7 (bottom) mbars.

Image of FIG. 9.
FIG. 9.

Integrated scattered intensity across the interelectrode gap for various as a function of the product .

Image of FIG. 10.
FIG. 10.

density calculated from the model presented in Ref. 28 as a function of the pressure for the three interelectrode distances considered.

Image of FIG. 11.
FIG. 11.

Effect of the input rf power on silane utilization (deposition rate on left axis and dissociation efficiency on right axis) for (left hand side series) and 25 mm (right hand side series). The gray bars represent the fraction transformed into powder.

Image of FIG. 12.
FIG. 12.

Light scattered intensity profiles across a 25 mm gap for different pressures.

Image of FIG. 13.
FIG. 13.

Particle agglomeration in the after-glow region for the three interelectrode distances considered.

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/content/aip/journal/jap/107/2/10.1063/1.3282802
2010-01-25
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Powder formation in SiH4–H2 discharge in large area capacitively coupled reactors: A study of the combined effect of interelectrode distance and pressure
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/2/10.1063/1.3282802
10.1063/1.3282802
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