1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Transition temperature in the growing of poly-Si/amorphous- by electron-beam evaporation
Rent:
Rent this article for
USD
10.1063/1.3294695
/content/aip/journal/jap/107/3/10.1063/1.3294695
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/3/10.1063/1.3294695
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Illustration of (a) grain formation, (b) the nearest interaction energy and the next nearest interaction energy , and (c) the different type of distributions of the substrate

Image of FIG. 2.
FIG. 2.

Island and grain distributions for different temperatures, with deposition rate at (a) 0.1 ML/s, (b) 0.3 ML/s, and (c) 0.5 ML/s.

Image of FIG. 3.
FIG. 3.

(a) Curves of average island size and crystallinity with increasing temperature at three deposition rates with , and the hollow squares are the positions of transition temperature for each deposition rate; (b) Comparison between the partial enlarged drawing of T-A curves in (a) and derivative of T-C curves.

Image of FIG. 4.
FIG. 4.

The SEM on top view of fabricated poly-Si thin films at (b) 830 K, (c) 850 K, and (d) 870 K.

Image of FIG. 5.
FIG. 5.

Curves of average island size and crystallinity with increasing temperature at three deposition rates with , and the hollow squares are the positions of transition temperature for each deposition rate.

Image of FIG. 6.
FIG. 6.

Comparison between simulated data and experimental data with .

Loading

Article metrics loading...

/content/aip/journal/jap/107/3/10.1063/1.3294695
2010-02-01
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Transition temperature in the growing of poly-Si/amorphous-SiO2 by electron-beam evaporation
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/3/10.1063/1.3294695
10.1063/1.3294695
SEARCH_EXPAND_ITEM