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Study of the Au Schottky contact formation on oxygen plasma treated -type (101) thin films
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10.1063/1.3298467
/content/aip/journal/jap/107/3/10.1063/1.3298467
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/3/10.1063/1.3298467
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

AFM images of (a) as-deposited and (b) .

Image of FIG. 2.
FIG. 2.

characteristics determined for as-deposited (open circles), (open triangles), and (solid squares) with Au contacts.

Image of FIG. 3.
FIG. 3.

Surface charge profile and dielectric dispersions of films obtained by measurements. (triangles) and (squares) with Au contacts.

Image of FIG. 4.
FIG. 4.

XPS of (a) Sn and (b) O from a film (; the surface-sensitive angle). Solid lines and open circles show spectra and sum-fitted curves, respectively. Dashed lines are fitted curves for each bond: , , , O–OH, and .

Image of FIG. 5.
FIG. 5.

(a) Measurement angle dependence of XPS intensity ratios of and . Circles, triangles, and squares refer to as-deposited, , and , respectively. (b) Schematic illustrations of plasma treated film surface structures.

Image of FIG. 6.
FIG. 6.

Measurement angle dependence of the chemical state of the Sn core level. Circles, triangles, and squares refer to as-deposited, , and , respectively.s

Image of FIG. 7.
FIG. 7.

Valence band photoemission spectra for (a) as-deposited, (b) , and (c) .

Image of FIG. 8.
FIG. 8.

Plasma treatment time dependence of VBMs (solid squares) and (open squares) of films.

Image of FIG. 9.
FIG. 9.

Schematic energy level diagrams for an (a) ideal interface prior to contacting, (b) Au contact on an as-deposited film, and (c) Au contact on a plasma treated film. : Fermi level of metal (Au), : Fermi level of , : conduction band, : valence band, : band gap, : metal work function of Au, : electron affinity of , Sn : core level for Sn , and : SBH of the Au contact to the plasma treated films (0.58–0.60 eV).

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/content/aip/journal/jap/107/3/10.1063/1.3298467
2010-02-02
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of the Au Schottky contact formation on oxygen plasma treated n-type SnO2 (101) thin films
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/3/10.1063/1.3298467
10.1063/1.3298467
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