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Physics and chemistry of hot-wire chemical vapor deposition from silane: Measuring and modeling the silicon epitaxy deposition rate
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10.1063/1.3298455
/content/aip/journal/jap/107/5/10.1063/1.3298455
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/5/10.1063/1.3298455
/content/aip/journal/jap/107/5/10.1063/1.3298455
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/content/aip/journal/jap/107/5/10.1063/1.3298455
2010-03-10
2014-09-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Physics and chemistry of hot-wire chemical vapor deposition from silane: Measuring and modeling the silicon epitaxy deposition rate
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/5/10.1063/1.3298455
10.1063/1.3298455
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