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Modeling the Kelvin polarization force actuation of micro- and nanomechanical systems
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View: Figures


Image of FIG. 1.
FIG. 1.

Actuation scheme of a dielectric beam experiencing the Kelvin polarization force normal toward the electrodes.

Image of FIG. 2.
FIG. 2.

Plot of the electric field over two electrode plates disturbed by a dielectric slab ( and ) surrounded by vacuum for a dielectric constant of (a) and (b). The electric field was simulated with FEM (Comsol).

Image of FIG. 3.
FIG. 3.

Schematic drawing of the electric field for the modeling of the .

Image of FIG. 4.
FIG. 4.

Fits of Eq. (18) to the field energy calculated with FEM for dielectric beams with and surrounded by air or vacuum . The electrode gap was and the voltage .

Image of FIG. 5.
FIG. 5.

plotted against the distance of the dielectric with , , and from the coplanar electrodes with an applied potential of in air or vacuum . The four curves represent for different electrode gap sizes . The insert shows the stored electrical field energy simulated with FEM. The simulated values are fitted with Eq. (18) with the fitting parameter . The fit was of high quality with coefficients of determination .

Image of FIG. 6.
FIG. 6.

plotted for different dielectric constants and heights. The FEM simulations were performed with the following conditions: , , , and . The lines are heuristic fits corresponding to Eq. (19).

Image of FIG. 7.
FIG. 7.

Normalized plotted for beams with and with different widths for a constant distance and a varying electrode gap (a) and for a constant electrode gap and a varying distance (b). The FEM simulations were done with the following parameters: and . The gray dotted lines are plots of Eq. (21) for the corresponding parameters. The black lines are a guide to the eye.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Modeling the Kelvin polarization force actuation of micro- and nanomechanical systems