Actuation scheme of a dielectric beam experiencing the Kelvin polarization force normal toward the electrodes.
Plot of the electric field over two electrode plates disturbed by a dielectric slab ( and ) surrounded by vacuum for a dielectric constant of (a) and (b). The electric field was simulated with FEM (Comsol).
Schematic drawing of the electric field for the modeling of the .
Fits of Eq. (18) to the field energy calculated with FEM for dielectric beams with and surrounded by air or vacuum . The electrode gap was and the voltage .
plotted against the distance of the dielectric with , , and from the coplanar electrodes with an applied potential of in air or vacuum . The four curves represent for different electrode gap sizes . The insert shows the stored electrical field energy simulated with FEM. The simulated values are fitted with Eq. (18) with the fitting parameter . The fit was of high quality with coefficients of determination .
plotted for different dielectric constants and heights. The FEM simulations were performed with the following conditions: , , , and . The lines are heuristic fits corresponding to Eq. (19).
Normalized plotted for beams with and with different widths for a constant distance and a varying electrode gap (a) and for a constant electrode gap and a varying distance (b). The FEM simulations were done with the following parameters: and . The gray dotted lines are plots of Eq. (21) for the corresponding parameters. The black lines are a guide to the eye.
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