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Structural morphology and Mn distribution in annealed InP coimplanted with P and Mn
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Image of FIG. 1.
FIG. 1.

XRD spectra for three InP(Fe) samples implanted and RTA annealed at for 1 min: (1) sample D; (2) sample C; and (3) sample A.

Image of FIG. 2.
FIG. 2.

RBS channelled spectrum (squares) for sample A. For comparison, the random spectrum (line) and the channelled spectrum for an unannealed Mn-implanted sample are also plotted. The surface positions of In, Mn, and P are indicated on the figure.

Image of FIG. 3.
FIG. 3.

Mn concentration profiles in InP(Fe) measured by SIMS for four samples as indicated. The annealing was done at 650 C for 1 min for three of the samples.

Image of FIG. 4.
FIG. 4.

(a) Bright field TEM image of sample A; high-resolution TEM images taken (b) at the interface between the dark and bright regions in (a) and (c) at 100 nm from the surface.

Image of FIG. 5.
FIG. 5.

(a) an STEM image of sample A; the yellow rectangle represents the area where the EDS mapping was carried out; (b), (c), and (d) are the EDS maps of Mn, P, and In, respectively. The arrows in figure (b) indicate the positions with the maximum Mn concentration.

Image of FIG. 6.
FIG. 6.

The field-cooled magnetization of sample B at 100 Oe.

Image of FIG. 7.
FIG. 7.

Magnetic moment curves for sample B at 5 and 110 K measured in-plane in the [110] direction.

Image of FIG. 8.
FIG. 8.

Magnetic moment of sample B at an applied field of 10 kOe as a function of the inverse temperature.


Generic image for table
Table I.

List of the implantation fluences and energies for the principal samples reported in this paper.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural morphology and Mn distribution in annealed InP coimplanted with P and Mn