XRD spectra for three InP(Fe) samples implanted and RTA annealed at for 1 min: (1) sample D; (2) sample C; and (3) sample A.
RBS channelled spectrum (squares) for sample A. For comparison, the random spectrum (line) and the channelled spectrum for an unannealed Mn-implanted sample are also plotted. The surface positions of In, Mn, and P are indicated on the figure.
Mn concentration profiles in InP(Fe) measured by SIMS for four samples as indicated. The annealing was done at 650 C for 1 min for three of the samples.
(a) Bright field TEM image of sample A; high-resolution TEM images taken (b) at the interface between the dark and bright regions in (a) and (c) at 100 nm from the surface.
(a) an STEM image of sample A; the yellow rectangle represents the area where the EDS mapping was carried out; (b), (c), and (d) are the EDS maps of Mn, P, and In, respectively. The arrows in figure (b) indicate the positions with the maximum Mn concentration.
The field-cooled magnetization of sample B at 100 Oe.
Magnetic moment curves for sample B at 5 and 110 K measured in-plane in the  direction.
Magnetic moment of sample B at an applied field of 10 kOe as a function of the inverse temperature.
List of the implantation fluences and energies for the principal samples reported in this paper.
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