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On the deposition mechanisms and the formation of glassy Cu–Zr thin films
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Image of FIG. 1.
FIG. 1.

Results of MD-simulations of Zr–Cu growth (Red and yellow spheres stand for Zr and Cu atoms, respectively), (a) D1 deposition , plan view, (b) D1 deposition , cross section, (c) D2a deposition , plan view, (d) D2a deposition , cross section, (e) D2b deposition , plan view, and (f) D2b deposition , cross section.

Image of FIG. 2.
FIG. 2.

RDFs of the simulated depositions of Cu–Zr TFMG for codeposition of Cu and Zr (D1) and sequential depositions (D2) of different Cu and Zr layers; the RDF of the crystalline ZrCu (B2 structure) is also shown for comparison.

Image of FIG. 3.
FIG. 3.

The evolution of the atomic environment of the deposited atoms during the simulated Cu–Zr deposition based on the CNA analysis: (a) D1 deposition, , (b) D2a deposition, , and (c) D2b deposition, .

Image of FIG. 4.
FIG. 4.

(a) Plan view HRTEM image showing the amorphous structure of the BMG target. The pure glassy state of the Zr–Cu films grown from the BMG ribbon is depicted in plan view HRTEM image and the corresponding SAED are shown in the insets; the same scale bar applies to both images. (b) Cross-section HRTEM image from a Zr–Cu glass film grown from a target.

Image of FIG. 5.
FIG. 5.

The nanocrystalline structure of a Zr–Cu film grown using a target consisting of Zr and Cu plates (sequential deposition); region A: a tetragonal C11b grain; region B: a hexagonal nanograin.

Image of FIG. 6.
FIG. 6.

XRD patterns from sputtered Zr–Cu films grown using (a) and (b) . Pure Cu (c) and Zr (d) films grown with identical conditions with Zr–Cu are displayed for comparison. The vertical bars indicate the powder diffraction pattern for (Ref. 37).


Generic image for table
Table I.

Comparison of the main kinetic and thermodynamic parameters for the formation of Zr–Cu glass in PLD, sputtering, and bulk casting.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: On the deposition mechanisms and the formation of glassy Cu–Zr thin films