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Spectroscopic ellipsometry investigation of the optical properties of nanostructured films
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10.1063/1.3331551
/content/aip/journal/jap/107/9/10.1063/1.3331551
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/9/10.1063/1.3331551

Figures

Image of FIG. 1.
FIG. 1.

EF-TEM observations of samples (a) S1, (b) S2, and (c) S3.

Image of FIG. 2.
FIG. 2.

Optical models used to characterize the SRSN films as (a) homogeneous film or (b) composite layers.

Image of FIG. 3.
FIG. 3.

Comparison of the fit of SE data achieved with BEMA and MG for S2.

Image of FIG. 4.
FIG. 4.

Evolution of film thicknesses and Si-QDs volume fraction with . The lines are guides for the eye.

Image of FIG. 5.
FIG. 5.

Optical functions of (a) as-deposited films and (b) annealed SRSN films obtained by -by-, inversion.

Image of FIG. 6.
FIG. 6.

Optical functions of (a) A2 and (b) S2 obtained by FB (dashed line) and TL (solid line) models in comparison with -by- inversion (dotted line).

Image of FIG. 7.
FIG. 7.

Stoichiometry of the samples as a function of . The lines are guides for the eye.

Image of FIG. 8.
FIG. 8.

DF of Si-QDs in annealed samples S1 (squares), S2 (circles), S3 (triangles) and S4 (diamonds) obtained by FB, TL, and -by- inversion.

Image of FIG. 9.
FIG. 9.

DF of Si-QDs in S2 obtained by FB (dashed line), TL (solid line), and -by- (dotted line).

Image of FIG. 10.
FIG. 10.

Evolution of the FB parameters describing the optical properties of the Si-QDs as a function of . The lines are guides for the eye.

Image of FIG. 11.
FIG. 11.

Evolution of the TL parameters, describing the optical properties of the Si-QDs as a function of . The lines are guides for the eye.

Tables

Generic image for table
Table I.

FB parameters of silicon nitride, a-Si, p-Si, and c-Si after Refs. 28 and 29.

Generic image for table
Table II.

TL parameters of silicon nitride and a-Si after Ref. 30.

Generic image for table
Table III.

Thicknesses of the as-deposited and annealed SRSN films obtained with FB and TL formulas on the range (1.5–5.9 eV).

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/content/aip/journal/jap/107/9/10.1063/1.3331551
2010-05-04
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spectroscopic ellipsometry investigation of the optical properties of nanostructured Si/SiNx films
http://aip.metastore.ingenta.com/content/aip/journal/jap/107/9/10.1063/1.3331551
10.1063/1.3331551
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