EF-TEM observations of samples (a) S1, (b) S2, and (c) S3.
Optical models used to characterize the SRSN films as (a) homogeneous film or (b) composite layers.
Comparison of the fit of SE data achieved with BEMA and MG for S2.
Evolution of film thicknesses and Si-QDs volume fraction with . The lines are guides for the eye.
Optical functions of (a) as-deposited films and (b) annealed SRSN films obtained by -by-, inversion.
Optical functions of (a) A2 and (b) S2 obtained by FB (dashed line) and TL (solid line) models in comparison with -by- inversion (dotted line).
Stoichiometry of the samples as a function of . The lines are guides for the eye.
DF of Si-QDs in annealed samples S1 (squares), S2 (circles), S3 (triangles) and S4 (diamonds) obtained by FB, TL, and -by- inversion.
DF of Si-QDs in S2 obtained by FB (dashed line), TL (solid line), and -by- (dotted line).
Evolution of the FB parameters describing the optical properties of the Si-QDs as a function of . The lines are guides for the eye.
Evolution of the TL parameters, describing the optical properties of the Si-QDs as a function of . The lines are guides for the eye.
FB parameters of silicon nitride, a-Si, p-Si, and c-Si after Refs. 28 and 29.
TL parameters of silicon nitride and a-Si after Ref. 30.
Thicknesses of the as-deposited and annealed SRSN films obtained with FB and TL formulas on the range (1.5–5.9 eV).
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