Schematic configuration of WM-SPPIL, the device is composed of a prism with a rectangle aperture , metal film , resist , and substrate. The thicknesses of waveguide and metal film are and , respectively, and is the incident angle.
Simulated interference patterns by FDTD with different (Constants , ), (a) and (b) comparing with (c) the result of conventional SPPIL.
Amplitude and contrast distributions with different (Constants , ), [(a), (c)] and [(b), (d)] .
Maximum exposure depth of interference pattern vs (a) (Constants , ), (b) (Constants , ), and (c) (Constants , ).
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