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Roughening of porous SiCOH materials in fluorocarbon plasmas
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10.1063/1.3446820
/content/aip/journal/jap/108/1/10.1063/1.3446820
http://aip.metastore.ingenta.com/content/aip/journal/jap/108/1/10.1063/1.3446820
/content/aip/journal/jap/108/1/10.1063/1.3446820
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/content/aip/journal/jap/108/1/10.1063/1.3446820
2010-07-09
2014-09-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Roughening of porous SiCOH materials in fluorocarbon plasmas
http://aip.metastore.ingenta.com/content/aip/journal/jap/108/1/10.1063/1.3446820
10.1063/1.3446820
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