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Growth of vertically-aligned carbon nanotube forests on conductive cobalt disilicide support
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10.1063/1.3456168
/content/aip/journal/jap/108/2/10.1063/1.3456168
http://aip.metastore.ingenta.com/content/aip/journal/jap/108/2/10.1063/1.3456168

Figures

Image of FIG. 1.
FIG. 1.

AFM images of layer. (a) as-prepared, (b) annealed for 15 min in 200/500 SCCM at , and (c) typical line scans of (a) and (b). Scale bar, 500 nm.

Image of FIG. 2.
FIG. 2.

XRD scans of samples after different process stages. The bottom scan shows a bare Si substrate for reference, the identification of the (220) reflection follows (Ref. 36)

Image of FIG. 3.
FIG. 3.

AFM images of annealed at . (a) 3 min in 200/500 SCCM , (b) 15 min in 400 SCCM Ar and 3 min in 200/500 SCCM , and (c) typical line scans of (a) and (b). Scale bar, 500 nm.

Image of FIG. 4.
FIG. 4.

AFM images of annealed at . (a) 3 min in 200/500 SCCM , (b) 15 min in 400 SCCM Ar and 3 min in 200/500 SCCM , and (c) typical line scans of (a) and (b). Scale bar, 500 nm.

Image of FIG. 5.
FIG. 5.

AFM images of annealed at . (a) 3 min in 200/500 SCCM , (b) 15 min in 400 SCCM Ar and 3 min in 200/500 SCCM , and (c) typical line scans of (a) and (b). Scale bar, 500 nm.

Image of FIG. 6.
FIG. 6.

SEM images of MWCNTs grown on [(a) and (b)] , [(c) and (d)] , and [(e) and (f)] , after 3 min pretreatment in 200/500 SCCM [(a), (c), and (e)] or 15 min pretreatment in 400 SCCM Ar followed by 3 min annealing in 200/500 SCCM [(b), (d), and (f)]. Scale bar, .

Image of FIG. 7.
FIG. 7.

(a) A high resolution SEM image taken at the bottom of a CNT mat grown at . Scale bar 200 nm. (b) TEM image of a typical MWCNT, scale bar 5 nm. (c) Histogram of the number of walls and diameters of MWCNTs grown from .

Image of FIG. 8.
FIG. 8.

An SEM image of a CNT mat grown on after interrupted growth of 2 min followed by 4 min. Scale bar .

Tables

Generic image for table
Table I.

Surface energies of solid metals, metallic compounds, and oxides in . [Data of Tyson and Miller (Ref. 22) are for liquid metals, multiplied by a constant factor of 1.18 to give values for the solid. The values of Vitos et al. (Ref. 24) were calculated by density functional theory, for the lowest energy face of the crystalline phase.]

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/content/aip/journal/jap/108/2/10.1063/1.3456168
2010-07-28
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Growth of vertically-aligned carbon nanotube forests on conductive cobalt disilicide support
http://aip.metastore.ingenta.com/content/aip/journal/jap/108/2/10.1063/1.3456168
10.1063/1.3456168
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