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Experiments and simulation on diffusion and activation of codoped with arsenic and phosphorous germanium
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10.1063/1.3456998
/content/aip/journal/jap/108/2/10.1063/1.3456998
http://aip.metastore.ingenta.com/content/aip/journal/jap/108/2/10.1063/1.3456998
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Intrinsic diffusion coefficients of phosphorus (a) and arsenic (b) in germanium determined from simulations of the experimental donor profiles obtained under monodoping conditions (symbols). The solid lines represent extrapolations of the diffusion coefficients reported in the literature, Refs. 6, 12, and 13, that are shown for comparison.

Image of FIG. 2.
FIG. 2.

Diffusion profiles of (a) P (symbols) and (b) As measured with SIMS after 30 min for all annealing temperatures. The solid lines are simulations of P and As diffusion for the concurrent codoping case.

Image of FIG. 3.
FIG. 3.

Temperature dependence of the intrinsic diffusion coefficient of phosphorus (a) and arsenic (b) under concurrent codoping conditions (filled circles) in comparison to data for monodoping conditions (filled squares) that represent the same total implantation dose of . The solid lines indicate data that are expected from the results reported in the literature [Chui et al. (Ref. 6), Carroll and Koudelka (Ref. 12), and Brotzmann and Bracht (Ref. 13)].

Image of FIG. 4.
FIG. 4.

SIMS concentration profiles of (a) P and (b) As (symbol) obtained after diffusion annealing for 30 min for all annealing temperatures for the lower initial dose of As . The solid lines are best simulations of diffusion under successive codoping conditions.

Image of FIG. 5.
FIG. 5.

Temperature dependence of the intrinsic diffusion coefficient of phosphorus [(a), filled circles] and arsenic [(b), filled circles] for successive codoping conditions as extracted from the simulations of the experimental profiles shown in Figs. 5 and 6. The intrinsic diffusion coefficients for monodoping conditions and an equal dose of (filled squares) are shown for comparison as well as data for P and As diffusion in our temperature range that are expected according to the results of Chui et al. (Ref. 6), Carroll et al. (Ref. 12), and Brotzmann et al. (Ref. 13).

Image of FIG. 6.
FIG. 6.

Concentration profiles of (a) P and (b) As (symbols) measured with SIMS after diffusion annealing for 30 min for all annealing temperatures under successive codoping for the higher initial dose of As . The solid lines are best simulations of the P and As diffusion behavior.

Image of FIG. 7.
FIG. 7.

Temperature dependence of the intrinsic diffusion coefficient of P [(a), filled circles] and As [(b), filled circles] obtained for successive codoping. Diffusion coefficients determined for monodoping with an equal total dose of are shown for comparison (filled squares). Solid lines indicate literature data of Chui et al. (Ref. 6), Carroll et al. (Ref. 12), and Brotzmann et al. (Ref. 13), for the intrinsic diffusion coefficient of P (a) and As (b) that are expected for our temperature range.

Image of FIG. 8.
FIG. 8.

Temperature dependence of the sheet resistance measured by means of the four point Van der Pauw method from the concurrent codoped samples. The extracted sheet resistance from levelled SIMS profiles, assuming a fixed maximum electrical activation of for P and for As dopant, is shown for comparison.

Image of FIG. 9.
FIG. 9.

Temperature dependence of the sheet resistance measured by means of the four point Van der Pauw method from the successive codoped samples for initial implanted As doses of (a) and (b) . The extracted sheet resistance from levelled SIMS profiles, assuming a fixed maximum electrical activation of for P and for As dopant, is shown for comparison.

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/content/aip/journal/jap/108/2/10.1063/1.3456998
2010-07-27
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experiments and simulation on diffusion and activation of codoped with arsenic and phosphorous germanium
http://aip.metastore.ingenta.com/content/aip/journal/jap/108/2/10.1063/1.3456998
10.1063/1.3456998
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