No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Investigation of the roles of gas-phase molecules and F atoms during fluorocarbon plasma processing of Si and substrates
Data & Media loading...
Article metrics loading...
Full text loading...