Schematic of the fabrication procedure for nanoscale epitaxial ferroelectric capacitors.
SEM images of nanoscale epitaxial ferroelectric capacitors with different radius: (a) 190 nm, (b) 35 nm, and (c) 20 nm, respectively. (c) shows a deposited nanoscale capacitor array with the AAO mask (bottom) and its magnified view (top). (Scale bars are 200 nm.)
Piezoresponse hysteresis loop of a nanoscale epitaxial ferroelectric capacitor with a radius of 35 nm.
Histogram of the positive and the negative remnant piezoelectric coefficient distributions for more than 100 nanoscale capacitors with a radius of 35 nm. The inset presents the histogram of the positive and the negative coercive voltage distributions.
(a) Phase and (b) amplitude PFM images of as-deposited capacitors with a radius of 35 nm. (Scale bar is 200 nm.)
PFM phase images of (a) a background poled and (b) a back-switched nanoscale capacitor. Scale bar is 50 nm. The dashed line in (a) indicates the location of the capacitor.
PFM phase images of (a) a background poled and (b) a back-switched micron-scale capacitor. (Scale bar is 360 nm.) The dashed line in (b) indicates the location of the capacitor.
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