banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Investigation of the crystallinity of N and Te codoped Zn-polar ZnO films grown by plasma-assisted molecular-beam epitaxy
Rent this article for


Image of FIG. 1.
FIG. 1.

RHEED observation with [(a)–(d)] and corresponding AFM results ([(e)–(h)] of u-ZnO and Te doped ZnO film (ZnO:Te) with different Te fluxes. [rms: (e) 3.54 nm, (f) 0.51 nm, (g) 4.18 nm, (h) 11.06 nm.]

Image of FIG. 2.
FIG. 2.

RHEED patterns with of u-ZnO and ZnO:N with different growth temperatures (a) u-ZnO , (b) u-ZnO , and (c) ZnO:Te .

Image of FIG. 3.
FIG. 3.

The surface morphology and roughness value of (a) u-ZnO, (b) ZnO:N, (c) ZnO:Te, and (d) film by AFM observation, respectively.

Image of FIG. 4.
FIG. 4.

Nitrogen concentration ([N]) of ZnO:N and films with different Te concentration ([Te]) and/or Te fluxes .

Image of FIG. 5.
FIG. 5.

The illustration of isoelectronic reaction for Te atoms incorporated into ZnO.

Image of FIG. 6.
FIG. 6.

(a) The FWHM of x-ray rocking curve for (0002) reflection of ZnO:N and film with different N flows. (b) X-ray -scans for (0002) reflection of u-ZnO film and those of ZnO:N and film under N flow of 0.2 SCCM.

Image of FIG. 7.
FIG. 7.

The c-axis lattice constants of u-ZnO, ZnO:N, and films evaluated by x-ray (0002) scans with elevating nitrogen flow.

Image of FIG. 8.
FIG. 8.

Low temperature (10 K) PL spectra of NBE for u-ZnO film, ZnO:N and (, ).

Image of FIG. 9.
FIG. 9.

Electron mobility with increasing N concentration of ZnO:N and films.

Image of FIG. 10.
FIG. 10.

The calculated (lines) compensation ratio with considering dislocation density and the measured the electron mobilities against electron concentrations of u-ZnO, ZnO:N, and film at RT.

Image of FIG. 11.
FIG. 11.

Williamson–Hall plots for ZnO:N and films evaluated by x-ray rocking curve for (0002) and (0004) reflections, respectively.


Generic image for table
Table I.

Electrical properties and nitrogen concentration of u-ZnO, ZnO:Te, ZnO:N, and film with different nitrogen flow and tellurium flux.


Article metrics loading...


Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of the crystallinity of N and Te codoped Zn-polar ZnO films grown by plasma-assisted molecular-beam epitaxy